ETH Zürich

Thin Film Physics Group

ETH Zürich
Departement of Physics, Laboratory for Solid State Physics, ETH Zürich, Switzerland; located at Technopark Zürich

Equipment and characterization techniques

4 chamber 3"-MBE-system (Molecular Beam Epitaxy)

  • Epitaxy on 3"-Silicon and BaF2 substrates
  • IIa-fluorides (CaF2, BaF2, SrF2)
  • IV-VI (PbSnTe, PbEuTe, PbSrTe)
  • IV-VI (PbSnSe, PbEuSe)
  • II-VI (CdTe, CdS)

PVD (physical vapour deposition)

  • 1 Balzers BAK 550 with e-beam source
  • 4 small bell jar evaporation plants


  • AFM, optional low temperature AFM microscopy
  • Scanning electron microscope with EDX
  • Nomarski light microscope


  • Spin-coating
  • 3"-maskaliner
  • Deep-UV photoresist polymerization equipment
  • Wet etching equipment
  • Plasmastripper
  • Profilometer

Electrooptic test equipment

  • Infrared sensors with closed cycle dewar 15K, I-V, C-V, spectral response
  • LN2-dewar with 4 prober needles
  • LN2-dewars for laser measurements
  • IR Spectrophotometer